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论文题目:
Design and fabrication of black alumina-based porous ceramic vacuum chuck with excellent optical, electrical and mechanical properties
作者:
Sun, Minghui; Li, Jiaheng; Quan, Xiangqian; Chen, Hetuo; Zhou, Guohong
刊物名称:
CERAMICS INTERNATIONAL
发表年度:
2025
卷:
51
期:
27
页码:
52336-52349
